Synthesis of Si ₃ N ₄ with Emphasis on Si‐S‐N Chemistry

Industrial production of Si 3 N 4 from SiCI 4 , is increasing. An element rivaling CI in abundance and cheapness with potentially suitable chemistry for this application is sulfur. Thus, Si–S–N chemistry was investigated to determine its usefulness in producing Si 3 N 4 . Bifunctionality in S, as opposed to mono‐functionality in CI, may allow special routes via polymers to become important.