Determination of YBaCuO thin layer structural parameters by using high-resolution X-ray diffractometry

YBa 2 Cu 3 O 7-x thin layers grown with a magnetron sputtering technique have been thoroughly investigated by using various X-ray diffractometry schemes. High-resolution triple-crystal setting has proved to be a powerful tool for identifying basic types of damage: out-of-plane grain misorientations, microstrain and grain size. By using double-axis modes, layer thickness and composition were extracted. The lattice parameter c of the layer was measured and discussed in comparison with that of bulk high-temperature superconductor crystals. The results obtained have promoted an essential extension of the range of the YBaCuO layer structural characteristics.