Preparation of Pb-Based Ferroelectric Thin Films at Room Temperature Using Excimer-Laser-Assisted Multi-Ion-Beam Sputtering

Pb-based ferroelectric thin films of PbTiO 3 , (Pb, La)TiO 3 and Pb(Zr, Ti)O 3 were fabricated on Pt/MgO and Pt/Ti/SiO 2 /Si substrates using an excimer-laser-assisted multi-ion-beam sputtering technique. During the deposition at room temperature, the surface of the films was irradiated with XeCl excimer laser pulses in order to promote surface reactions. X-ray diffraction and in situ reflection high-energy electron diffraction measurements demonstrated that the films with perovskite structure were epitaxially grown with preferential a -axis orientation. The prepared PZT films exhibited the dielectric constant of 248 and ferroelectric P-E hysteresis loops.