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Lead zirconate-titanate (PZT, PbZr x Ti1-x O3, x=0.2-0.9) films with submicron thickness (600-900 nm) were prepared using an rf-magnetron sputtering technique. The crystal structure and the orientation of the films were studied as a function of the substrate temperature. The relationships between electric properties and the film compositions were elucidated. The films of x=0.90 exhibit a large remanent polarization of 46 µC/cm2 and small coercive force of 28 kV/cm. In addition, no fatigue after >1011 cycles under an accelerated bipolar stressing was observed.
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Iijima et al. (1991) studied this question.
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