A study has been made of aluminum oxide films prepared by the hydrolysis of mixtures of AlCl 3 , H 2 , and CO 2 . Positive shifts of the flat band voltage of the MAS structure occur independently of the polarity and type of the applied bias when this is higher than a critical voltage. This phenomenon can be explained by electron injection and trapping. The trapped electrons have a long lifetime, but are excited by radiation such as x‐rays and electron beam without introduction of damage.
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Tsujide et al. (1970) studied this question.