Pinhole Array Camera for Integrated Circuits

A pinhole camera has been designed, fabricated, and tested for the production of multiple images for integrated circuits, consisting of an array of precisely positioned, uniform diameter pinholes and a vacuum back to hold the film or plate. This camera was designed to replace the step-and-repeat camera method that is presently used for producing multiple images. The two basic requirements for repetition of circuit patterns are the achievement of high image quality and precise registration between all the masks in a set. The arrangement discussed here permits lines of 12.5 microm width in the final working mask with precise registration to all other masks in the set.