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December 1, 1989Journal of Applied Physics

Spatially and temporally resolved laser-induced fluorescence measurements of CF2 and CF radicals in a CF4 rf plasma

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Authors

JBJean‐Paul BoothCentre National de la Recherche ScientifiqueGHG. HancockMemorial University of NewfoundlandNPN. D. PerryCentre National de la Recherche Scientifique

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Booth et al. (1989) studied this question.

synapsesocial.com/papers/6a87ff0f2d13770579f4cccehttps://doi.org/10.1063/1.343712
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