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May 1, 1983Journal of The Electrochemical SocietyOpen Access

Plasma Etch Anisotropy—Theory and Some Verifying Experiments Relating Ion Transport, Ion Energy, and Etch Profiles

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CZC. B. ZarowinDanbury Hospital

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C. B. Zarowin (1983) studied this question.

synapsesocial.com/papers/6a87ff112d13770579f4ccd1https://doi.org/10.1149/1.2119905
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