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September 1, 1976Applied Spectroscopy

Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum

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EDE. O. DegenkolbAdTech Systems Research (United States)CMC. J. MogabMotorola (United States)MGMichael R. Goldrick

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Degenkolb et al. (1976) studied this question.

synapsesocial.com/papers/6a87ff4fa082a64c2914b5aahttps://doi.org/10.1366/000370276774456895
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  1. 1Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists1977 · 18 citations