A gated room temperature integrated photoluminescence (PL) technique for estimating interface state densities in III-V metal–insulator–semiconductor (MIS) structures is described. The use of gated low temperature spectral PL has already been demonstrated to be more sensitive than conventional 1 MHz capacitance–voltage (C–V) measurements. Room temperature integrated PL was measured on InP MIS structures and interface state densities of ∼ 1012 (cm2eV)−1 were calculated, similar to those reported earlier. Furthermore, the elimination of spectroscopic and cryogenic equipment makes this technique simpler and more cost effective than the spectral method, more comparable to C–V measurements.
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Ochiai et al. (1993) studied this question.
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