Optimized soft magnetic properties and high frequency characteristics of obliquely deposited Co–Zr thin films

Co 100− x Zr x ( x ⩽ 16.7) films with designable in-plane uniaxial magnetic anisotropy have been prepared by oblique sputtering at room temperature. It has been found that the introduction of a small amount of Zr into obliquely deposited Co films results in excellent soft magnetic properties and high frequency responses. We have qualitatively explained that such an optimization comes from the enhancement of exchange coupling between the Co grains in the films by using the random anisotropy model. Thus, the magnetocrystalline anisotropy of grains can be suppressed and the ‘obliquely induced’ anisotropy can become dominant in determining the static and dynamic properties of the obliquely deposited films. Therefore, films with designable static and dynamic properties can be easily obtained by controlling the deposition angles, as illustrated in our data.