In situ fabrication of Co90Nb10 soft magnetic thin films with adjustable resonance frequency from 1.3to4.9GHz

In this work, we realized in situ fabricated Co90Nb10 soft magnetic thin films, with variable in-plane uniaxial magnetic anisotropy, without using the field induced method or postfabrication treatment. In situ control over the in-plane uniaxial magnetic anisotropy field, which varied from 1.6to22.7kAm−1, was achieved by adjusting the deposition oblique angle from 0° to 38°. As a consequence, the resonance frequencies of the films were continuously increased from 1.3to4.9GHz.