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January 1, 1999Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Ultraviolet-ozone jet cleaning process of organic surface contamination layers

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DMDae Won MoonDaegu Gyeongbuk Institute of Science and TechnologyAKAkira KurokawaNational Institute of Advanced Industrial Science and TechnologySIShingo IchimuraWaseda University

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Moon et al. (1999) studied this question.

synapsesocial.com/papers/6a883ff82c11edba2ecf1af8https://doi.org/10.1116/1.581565
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