Measurements of the thickness dependence of the electrical resistance of two very thin Cr films deposited at substrate temperatures of 385 and 360 ^∘{}C and pressures of 10^-7 and 10^-6 Torr are reported. The various conduction mechanisms have been identified and a metal-insulator region spanning about 5.5 nm of thickness has been found. In this region the resistance of both films follows the scaling law R{∝}(d-dc{)}^{{{-}}t}with t=1.34±0.11 and{d}c$ equal to 1.64±{}0.20 and 1.03±{}0.20 nm.
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Lourens et al. (1988) studied this question.
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