YBa2Cu3O7−x thin film over 3 in. substrate using off-axis excimer laser deposition

A large area c-axis oriented YBa2Cu3O7−x thin film was grown on a 3-in. LaAlO3 substrate using off-axis excimer laser deposition. Substrate rotation and laser beam scan on a target enabled thickness variations less than ±4% over the 3-in. film. The superconducting transition temperature was 88.4–90.8 K and the critical current density was in excess of 106 A/cm2 at 77 K under the zero magnetic field. The surface was smooth with few outgrowths, and the density of particles was 104/cm2, which is 1/100 less than that yielded on-axis laser deposition.