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November 1, 1990IBM Journal of Research and Development

Surface chemistry of the WF 6 -based chemical vapor deposition of tungsten

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MYMingling YuHong Kong Polytechnic UniversityKAK. Y. AhnIBM (United States)

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Yu et al. (1990) studied this question.

synapsesocial.com/papers/6a88f6f7cb3766d3cd130b19https://doi.org/10.1147/rd.346.0875
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