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September 1, 1985Applied Physics Letters

Metal-oxide-semiconductor field-effect transistors fabricated using self-aligned silicide technology

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Authors

BTB-Y. TsaurMIT Lincoln LaboratoryCAC. H. AndersonCollege of the Holy Cross

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Tsaur et al. (1985) studied this question.

synapsesocial.com/papers/6a6f80dfe5469ee92be06f6ehttps://doi.org/10.1063/1.96115
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