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October 1, 1973Journal of Applied Physics

Reaction kinetics of tungsten thin films on silicon (100) surfaces

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Authors

LLL. D. LockerUniversity of Maryland, College ParkCCC. D. CapioAT&T (United States)

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Locker et al. (1973) studied this question.

synapsesocial.com/papers/6a6f80976c240de38cdb8027https://doi.org/10.1063/1.1661965
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