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January 1, 1973Journal of The Electrochemical SocietyOpen Access

Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon

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YYY. YatsurugiKomatsu (Japan)NANobu AkiyamaNational Sagamihara HospitalYEYoshiyuki EndoUniversity of Minnesota

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Yatsurugi et al. (1973) studied this question.

synapsesocial.com/papers/6a8918a96abbd4965f28b2b2https://doi.org/10.1149/1.2403610
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