A soft X-ray reflectometer with a laser-produced plasma source driven by a Q-switched Nd: YAG laser or a XeCl excimer laser was constructed. By comparing the reflectances of a multilayer mirror with the data obtained using synchrotron radiation, its usefulness for reflectance measurements in the soft X-ray region (40-130 eV) is demonstrated.
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Nakayama et al. (1990) studied this question.
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