GaAs/AlGaAs self-sensing cantilevers for low temperature scanning probe microscopy

We have fabricated scanning probe microscope cantilevers with dimensions 65×11.4×0.25 μm3 and 3×2×0.129 μm3 from GaAs/Al0.3Ga0.7As heterostructures containing two-dimensional electron gases. Deflection is measured by an integrated field-effect transistor (FET) that senses strain via the piezoelectric effect and provides a low noise, low power displacement readout. We present images of a 200 nm mica grating taken with the large cantilever having a deflection (force) noise 10 Å/√Hz (19 pN/√Hz) at T=2.2 K. The small cantilever has a resonant frequency of 11 MHz, a FET gate charge noise of 0.001 e/√Hz, and is projected to have a deflection (force) noise of 0.002 Å/√Hz (1 pN/√Hz) at T=4.2 K.