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September 21, 2009Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system

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SESamuel D. EkpeFJF. JiménezDFDavid Field

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Ekpe et al. (2009) studied this question.

synapsesocial.com/papers/6a8932661a276c874728d1c7https://doi.org/10.1116/1.3222874
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