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December 15, 1997Journal of Applied Physics

The analysis of background gas heating in direct current sputtering discharges via particle simulation

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VSVladimir V. SerikovSaint Petersburg Mining UniversityKNKenichi NanbuTohoku University

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Serikov et al. (1997) studied this question.

synapsesocial.com/papers/6a8932691fb56efa37d43690https://doi.org/10.1063/1.366497
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