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January 1, 1999Plasma Sources Science and Technology

Ion energy distributions in rf sheaths; review, analysis and simulation

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Authors

EKEmi KawamuraUniversity of California, BerkeleyVVVahid VahediIran University of Medical SciencesMLM. A. LiebermanUniversity of California, Berkeley

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Kawamura et al. (1999) studied this question.

synapsesocial.com/papers/6a8932cea90c2f4c44fb8ab6https://doi.org/10.1088/0963-0252/8/3/202
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