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October 31, 2000Plasma Sources Science and TechnologyOpen Access

Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions

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WGW. J. GoedheerLeiden University

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W. J. Goedheer (2000) studied this question.

synapsesocial.com/papers/6a8932d8b6153083a5deee4ahttps://doi.org/10.1088/0963-0252/9/4/306
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