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January 1, 1979IBM Journal of Research and Development

Electrical Properties of RF Sputtering Systems

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Authors

JKJohn H. KellerAustralian National UniversityWPWilliam B. PennebakerIBM Research - Thomas J. Watson Research Center

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Keller et al. (1979) studied this question.

synapsesocial.com/papers/6a89331b5c716ca1a5d436cbhttps://doi.org/10.1147/rd.231.0003
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