A helical resonator plasma source is a resonant, slow-wave, plasma-loaded structure. It consists of a cylindrical plasma generated by a surrounding helical coil, which, in turn, is surrounded by an earthed coaxial cylinder. Such sources can be efficiently matched to an external power source and can operate at low gas pressures. A quasi-static approximation is used to obtain the fields, which are then employed to calculate the electron heating. The equations of particle and energy balance are used to obtain plasma density and temperature. To solve these equations simultaneously, an iterative procedure is used. Experimental measurements of density and coil voltage as a function of input power are obtained for argon and nitrogen, at 20 mTorr and 2 mTorr. Comparison with theory indicates qualitative agreement. Observed differences between theory and experiment are discussed.
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Niazi et al. (1994) studied this question.
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