Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
April 1, 1989IEEE Transactions on Plasma Science

Dynamics of a collisional, capacitive RF sheath

View Full Paper
Ask AI
Bookmark
Share

Authors

MLM. A. LiebermanUniversity of California, Berkeley

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

M. A. Lieberman (1989) studied this question.

synapsesocial.com/papers/6a82fb2df2457b8164efdd07https://doi.org/10.1109/27.24645
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Analytical solution for capacitive RF sheath1988 · 555 citations
  2. 2On the Origin of the Cosmic Radiation1949 · 2,336 citations
  3. 3Influence of Scattering and Ionization on RF Impedance in Glow Discharge Sheaths1979 · 63 citations
  4. 4Application of RF Discharges to Sputtering1970 · 259 citations
  5. 5Application of rf discharges to sputtering2000 · 235 citations