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January 1, 1988IEEE Transactions on Plasma Science

Analytical solution for capacitive RF sheath

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MLM. A. LiebermanUniversity of California, Berkeley

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M. A. Lieberman (1988) studied this question.

synapsesocial.com/papers/6a82fb1ef2457b8164efdce3https://doi.org/10.1109/27.16552
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