Transport Coefficients for Electrons in Mixtures of Ar and HBr

We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E / N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E / N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.