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August 1, 2004Japanese Journal of Applied PhysicsOpen Access

Sheath Model for Dual-Frequency Capacitively Coupled Plasmas

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Authors

KDKazuki DenpohTokyo Electron (Japan)GWGo WakayamaKNKenichi NanbuTohoku University

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Denpoh et al. (2004) studied this question.

synapsesocial.com/papers/6a893553d76717fba3eb15a8https://doi.org/10.1143/jjap.43.5533
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