Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
September 1, 1999Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsOpen Access

Two-dimensional CT images of two-frequency capacitively coupled plasma

View Full Paper
Ask AI
Bookmark
Share

Authors

TKTakeshi KitajimaNational Defence AcademyYTYukari H. TakeoHoward Hughes Medical InstituteTMToshiaki MakabeKeio University

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Kitajima et al. (1999) studied this question.

synapsesocial.com/papers/6a7095d231a3df824328d65ahttps://doi.org/10.1116/1.581989
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations*1993 · 176 citations
  2. 2Mechanism of Radical Control in Capacitive RF Plasma for ULSI Processing1998 · 63 citations
  3. 3Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition1992 · 169 citations
  4. 4High selectivity plasma etching of silicon dioxide with a dual frequency 27/2 MHz capacitive radio frequency discharge1996 · 84 citations
  5. 5Independent control of ion density and ion bombardment energy in a dual RF excitation plasma1993 · 100 citations