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July 1, 1993Physics of Fluids B Plasma Physics

Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations*

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Authors

VVVahid VahediIran University of Medical SciencesCBC.K. BirdsallUniversity of California, BerkeleyMLM. A. LiebermanUniversity of California, Berkeley

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Vahedi et al. (1993) studied this question.

synapsesocial.com/papers/6a82fabc88eff2bd7befdc4ehttps://doi.org/10.1063/1.860711
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