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March 12, 1990Applied Physics Letters

Electron heating in low-pressure rf glow discharges

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Authors

MSM. SurendraInstitute of EngineeringDGDavid B. GravesPrinceton UniversityIMI. J. MoreyApplied Materials (United States)

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Surendra et al. (1990) studied this question.

synapsesocial.com/papers/6a70969bfebe604dd7095bf9https://doi.org/10.1063/1.102604
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