Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
July 1, 1987Journal of Applied Physics

Fluid model simulations of a 13.56-MHz rf discharge: Time and space dependence of rates of electron impact excitation

View Full Paper
Ask AI
Bookmark
Share

Authors

DGDavid B. Graves

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

David B. Graves (1987) studied this question.

synapsesocial.com/papers/6a70969bfebe604dd7095c01https://doi.org/10.1063/1.339111
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1A Continuum Model of DC and RF Discharges1986 · 356 citations
  2. 2Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges1986 · 171 citations
  3. 3Spatial dependence of particle light scattering in an rf silane discharge1985 · 123 citations
  4. 4Negative Ion Kinetics in RF Glow Discharges1986 · 256 citations
  5. 5Monte-Carlo simulation of electron properties in rf parallel plate capacitively coupled discharges1983 · 180 citations