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May 1, 1989Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Comparison of experimental measurements and model predictions for radio-frequency Ar and SF6 discharges

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ΕGΕvangelos GogolidesNational Centre of Scientific Research "Demokritos"JNJean‐Philippe NicolaïLaboratoire Génie IndustrielHSHerbert H. SawinMassachusetts Institute of Technology

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Gogolides et al. (1989) studied this question.

synapsesocial.com/papers/6a7096245671bbf00bc2bb22https://doi.org/10.1116/1.576219
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