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May 1, 1989Applied Physics Letters

Modeling of a rf glow discharge plasma

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Authors

KOK. OkazakiTMToshiaki MakabeKeio UniversityYYYukio YamaguchiJapan Chemical Industry Association

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Okazaki et al. (1989) studied this question.

synapsesocial.com/papers/6a7096245671bbf00bc2bb21https://doi.org/10.1063/1.101277
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