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June 1, 1995Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics

Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge

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Authors

UKUwe KortshagenUniversity of MinnesotaIPI. PukropskiLTL. D. TsendinPeter the Great St. Petersburg Polytechnic University

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Kortshagen et al. (1995) studied this question.

synapsesocial.com/papers/6a893555d76717fba3eb15aehttps://doi.org/10.1103/physreve.51.6063
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