Piezoelectric electron-acoustic probe (PEAP) and some applications

Piezoelectric Electron-Acoustic Probe has been built in our lab recently, which is an new technique for imaging and characterization of thermal, elastic and pyroelectric property variations on a microscale resolution. Some electron acoustic photographs for different samples, are presented. The results show that electron-acoustic imaging has its own features over secondary electron imaging. In addition, PEAP with different operation model has important potential applications on ferroelectric semiconductor, ferroelectric thin film, ferroelectric semiconductor integrated device, those are also described.