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April 22, 2008Optics ExpressOpen Access

Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler

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QFQing FangKunming University of Science and TechnologyJSJunfeng SongNanyang Institute of TechnologySTShaohua TaoCentral South University

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Fang et al. (2008) studied this question.

synapsesocial.com/papers/6a8941921e528df4f2ec61c3https://doi.org/10.1364/oe.16.006425
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