An XPS study is made on a‐GeOx films prepared by deoxidizing GeO2 in Ar—H plasma. The XPS spectra of Ge 3d electrons are decomposed to five components, whose chemical shifts are estimated by taking into account the remote inductive effect and using the modified Sanderson method. The results are well explained by the model for the atomic configuration in the region of 1.3 < < x < 2.
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Takano et al. (1985) studied this question.
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