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February 15, 2003Japanese Journal of Applied Physics

Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO3/Pt Capacitors at Low Substrate Temperatures

Der-Chi Shye Chuan-Chou Hwang Ming-Jiunn Lai Cheng-Chung Jaing Jyh-Shin Chen Stewart Huang Miin‐Horng Juang Sien Chi Huang‐Chung Cheng

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Abstract

Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO3/Pt Capacitors at Low Substrate Temperatures, Shye, Der-Chi, Hwang, Chuan-Chou, Lai, Ming-Jiunn, Jaing, Cheng-Chung, Chen, Jyh-Shin, Huang, Stewart, Juang, Miin-Horng, Chiou, Bi-Shiou, Cheng, Huang-Chung

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Cite This Study

Shye et al. (2003) studied this question.

synapsesocial.com/papers/6a8968b5abe412682d92e000 https://doi.org/10.1143/jjap.42.549

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