This paper deals with an optical servo system using a bimorph PLZT actuator which has relatively large displacement. This optical actuator works by controlling the intensity of irradiated U. V. beam using the feedback controller. An optical actuator servo system is proposed as a mathematical model of the optical actuator, and the transfer function of the optical servo control system is identified. Optical servo control experiments are conducted. To improve the response of the bimorph PLZT actuator, U. V. beams are irradiated on both sides of it. We also show the experimental results of the double-sided U. V. beam irradiation.
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Fukuda et al. (1995) studied this question.