Through seeded lateral overgrowth, c-axis oriented PbTiO3 films are prepared on patterned Pt electrodes on a (100) SrTiO3 single crystal plate. Large piezoelectricity in terms of thickness vibration mode had been characterized by analyzing the impedance characteristics. In this paper, film growth is discussed to clarify the growth mode. Also, to characterize the film quality, ferroelectric properties are investigated in detail. Structural phase transition and dielectric phase transition are observed to show the similarity of the films’ characteristics to those of single crystals.
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Kushida et al. (1990) studied this question.
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