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September 1, 1991Japanese Journal of Applied Physics

SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

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SYShintaro YamamichiNEC (Japan)TSToshiyuki SakumaNihon UniversityKTKoichi TakemuraHokkaido University of Science

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Yamamichi et al. (1991) studied this question.

synapsesocial.com/papers/6a896943186271ac99333cf8https://doi.org/10.1143/jjap.30.2193
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