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October 1, 1977Journal of Physics D Applied PhysicsOpen Access

A study of silicon oxides prepared by oxygen implantation into silicon

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MBM.H. BadawiHelwan UniversityKAK.V. AnandUniversity of Kent

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Badawi et al. (1977) studied this question.

synapsesocial.com/papers/6a897bba1fb56efa37d4528ehttps://doi.org/10.1088/0022-3727/10/14/009
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