Sol−Gel Synthesis of Low-Loss MgTiO3 Thin Films by a Non-Methoxyethanol Route

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A cost-effective and hazard-free sol−gel method for the synthesis of single-phase MgTiO 3 thin film is reported here, using (MgNO 3 ) 2 ·6H 2 O and TiC 16 H 36 O 4 as precursors and employing either acetic acid or acetyl acetone as the stabilizers for titanium n-butoxide. The effect of the stabilizers on the structure, microstructure and electrical properties is evaluated. Acetyl-acetone-based films have a denser and more homogeneous microstructure than the acetic-acid-derived films, which is directly reflected in their dielectric properties. Acetyl acetone derived films annealed at 700 °C exhibit a dielectric constant, ε r = 16.3 and dielectric loss, tan δ = 0.0021 at 1 MHz. The differences are attributed to the lower reactivity of acetyl-acetone-stabilized sols and higher crystallization temperature of acetyl acetone derived films.