Influence of the Interatomic Potential and the Elastic Scattering Cross‐Section Approximation on the Spatial Distribution of Implanted Ions

The elastic scattering cross‐sections are calculated both in the framework of Lindhard wide‐angle extrapolation method and on the basis of an exact solution of the classical equation of motion of a particle in a central‐force potential. Using a direct method for the numerical solution of integro‐differential equations governing the ion implantation spatial distribution parameters, the projected ranges, projected and lateral stragglings, and skewnesses are calculated in a wide interval of reduced energies. It is shown that for incident energies ε < 0.1 all these parameters are affected by the choice of both the interatomic potential and elastic scattering cross‐section approximation.