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November 1, 1992Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Oxidation of sub-50 nm Si columns for light emission study

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Authors

HLHarvey I. LiuStanford UniversityNMN.I. MalufStanford UniversityRPR. F. W. PeaseStanford University

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Cite This Study

Liu et al. (1992) studied this question.

synapsesocial.com/papers/6a89cf5df8670bac6e335d1ahttps://doi.org/10.1116/1.585971
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