The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO 2 and Si 3 N 4 . The influence of the different parameters, the cascade fitting and the use of calculated λ( E ) K ( E , T ) functions or of the ‘Universal Cross‐section’ are examined in detail. It is shown that the method can be applied quite successfully for quantitative analysis when matrix corrections are considered.
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H. Bender (1990) studied this question.
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